Impact of Sidewall Conditions on Internal Quantum Efficiency and Light Extraction Efficiency of Micro‐LEDs
Sign Up to like & getrecommendations! Published in 2023 at "Advanced Optical Materials"
DOI: 10.1002/adom.202203128
Abstract: The sidewall condition is a key factor determining the performance of micro‐light emitting diodes (µLEDs). In this study, equilateral triangular III‐nitride blue µLEDs are prepared with exclusively m‐plane sidewall surfaces to confirm the impact of… read more here.
Keywords: sidewall conditions; impact sidewall; quantum efficiency; microscopy ... See more keywords
Numerical analysis for optimization of the sidewall conditions in a capacitively coupled plasma deposition reactor
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Applied Physics"
DOI: 10.1063/1.5120265
Abstract: Capacitively coupled plasma (CCP) is mainly being used in the semiconductor industry for plasma-enhanced chemical vapor deposition of uniform thin films. Because a discharge volume in the standard configuration of a CCP reactor is surrounded… read more here.
Keywords: coupled plasma; capacitively coupled; deposition; sidewall conditions ... See more keywords