Sidewall profile reconstruction of microstructures with high aspect ratio based on near-infrared light scanning interferometry
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DOI: 10.1063/1.5049494
Abstract: Sidewall profile reconstruction of microstructures with the high aspect ratio is a problem urgently to be solved in MEMS field. In this paper, a measuring method based on near-infrared light scanning interferometry (NILSI) is presented… read more here.
Keywords: near infrared; infrared light; profile reconstruction; sidewall profile ... See more keywords
Sidewall Profile Dependent Nanostructured Ultrathin Solar Cells With Enhanced Light Trapping Capabilities
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DOI: 10.1109/jphot.2019.2961566
Abstract: Theoretical studies of ultra-thin silicon solar cells with cylindrical, conical and parabolic surface nanostructures inherited from natural self-assembled anodic alumina oxide (NSA-AAO) were performed by finite-difference time-domain (FDTD) method. All nanostructured solar cells obtained an… read more here.
Keywords: solar cells; dependent nanostructured; ultrathin solar; profile dependent ... See more keywords
Subwavelength grating microlens with taper-resistant characteristics.
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DOI: 10.1364/ol.42.001031
Abstract: The subwavelength grating microlens has attracted much attention due to its variety of potential applications. Instead of the vertical sidewall profile normally considered by most recent works, a tapered sidewall profile is often obtained during… read more here.
Keywords: subwavelength grating; microlens taper; tapered sidewall; grating microlens ... See more keywords