Articles with "sidewall roughness" as a keyword



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The effect of sidewall roughness on the shaft resistance of rock-socketed piles

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Published in 2017 at "Acta Geotechnica"

DOI: 10.1007/s11440-016-0470-8

Abstract: Piles socketed into rock are increasingly used to support loads from large-span bridges and heavy buildings. Peak side resistance is typically related to unconfined compressive strength, sidewall roughness and rock mass quality. This paper presents… read more here.

Keywords: sidewall roughness; resistance; socketed piles; rock ... See more keywords
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Improving sidewall roughness by combined RIE-Bosch process

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Published in 2018 at "Materials Science in Semiconductor Processing"

DOI: 10.1016/j.mssp.2018.04.033

Abstract: Abstract An approach for improving sidewall roughness of high-aspect-ratio trench is developed. This method relies on the aspect ratio dependent scalloping attenuation (ARDSA) effect in Bosch process, employs reactive ion etching (RIE) process to avoid… read more here.

Keywords: improving sidewall; process; sidewall roughness; bosch process ... See more keywords
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Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings.

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Published in 2022 at "Optics express"

DOI: 10.1364/oe.473602

Abstract: Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are… read more here.

Keywords: high aspect; sidewall roughness; transmission; efficiency ... See more keywords