Force controlled SU-8 micropipettes fabricated with a sideways process
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DOI: 10.1088/1361-6439/aac83c
Abstract: We established an in-plane microfabrication process of polymeric AFM micropipettes that include a microchannel with an aperture at the apex without further processing after wafer scale lithography. The channel was obtained by etching a sacrificial… read more here.
Keywords: controlled micropipettes; micropipettes fabricated; sideways process; process ... See more keywords