Alignment control of self-ordered three dimensional SiGe nanodots
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DOI: 10.1088/1361-6641/aae62d
Abstract: Alignment control of three dimensional (3D) SiGe nanodot arrangements is investigated using a reduced pressure chemical vapor deposition system. Several cycles of SiGe layers with 30% Ge content and Si spacers are deposited by SiH4-GeH4… read more here.
Keywords: sige nanodots; surface; alignment control; sige nanodot ... See more keywords