Three-Dimensional Self-Ordered Multilayered Ge Nanodots on SiGe
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DOI: 10.1149/2162-8777/acce06
Abstract: Three-dimensional (3D) self-ordered Ge nanodots in cyclic epitaxial growth of Ge/SiGe superlattice on Si0.4Ge0.6 virtual substrate (VS) were fabricated by reduced pressure chemical vapor deposition. The Ge nanodots were formed by Stranski-Krastanov mechanism. By the… read more here.
Keywords: dimensional self; sige spacer; ordered multilayered; self ordered ... See more keywords