High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC)
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DOI: 10.1007/s11432-019-2700-1
Abstract: Dear editor, Three-dimensional monolithic integration (3D-MI) has recently emerged for both “more Moore” and “more than Moore” applications, because of its high integration density, high bandwidth and multi-functions [1]. With 3D-MI, different types of devices… read more here.
Keywords: seed; crystallization; nisi2 seed; epitaxial crystallization ... See more keywords