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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-015-2737-7
Abstract: An SU-8-silicon(100)-SU-8 flexible composite sandwich structure is studied. Besides preventing corrosion to the thin silicon membrane, SU-8 photoresist coated on the silicon membrane improves its flexibility as shown by an ANSYS finite element simulation. Using…
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Keywords:
structure based;
silicon 100;
sandwich structure;
silicon ... See more keywords
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Published in 2020 at "Extreme Mechanics Letters"
DOI: 10.1016/j.eml.2020.101052
Abstract: Abstract Research in stretchable electronics is helping to revolutionize the current electronic industry, particularly in wearable and bio-integrated devices. Cost-effectiveness and easy manufacturing are key factors that contribute to shaping the fate of such technologies.…
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Keywords:
parylene coating;
silicon 100;
fabrication;
stress concentration ... See more keywords
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Published in 2021 at "Scientific Reports"
DOI: 10.1038/s41598-021-93398-z
Abstract: Integration of functional infrared photodetectors on silicon platforms has been gaining attention for diverse applications in the fields of imaging and sensing. Although III–V semiconductor is a promising candidate for infrared photodetectors on silicon, the…
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Keywords:
iii nanowires;
meta absorber;
nanowires silicon;
plasmonic photonic ... See more keywords