Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement
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DOI: 10.1109/jmems.2021.3079362
Abstract: The V-shaped electrothermal actuator has gained significant popularity as it was demonstrated to be a compact, stable and high rectilinear displacement device. However, existing electrothermal actuators usually require the driven voltage as high as several… read more here.
Keywords: voltage; silicon actuator; power; metal silicon ... See more keywords