A Study of Ammonium Bifluoride as an Agent for Cleaning Silicon Contamination in the Wafer Dicing Process
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DOI: 10.3390/app13095294
Abstract: A new cleaning agent for silicon contamination in the wafer dicing process was formulated in this research. Ammonium bifluoride was introduced as the main ingredient in the formula, and MSA and sulfuric acid were added… read more here.
Keywords: contamination; silicon contamination; wafer dicing; dicing process ... See more keywords