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Published in 2018 at "Optical Materials Express"
DOI: 10.1364/ome.8.000050
Abstract: We design, fabricate, and characterize the terahertz integrated resonators on the silicon platform. Based on mode analysis and selection, the high-Q feature of resonators made of low-loss high-resistivity Si material is achieved due to the…
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Keywords:
silicon dielectric;
terahertz integrated;
device high;
high silicon ... See more keywords