Electrochemical local etching of silicon in etchant vapor.
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DOI: 10.1039/c9nr10420h
Abstract: Direct machining and imprinting of Si are beneficial for simplifying the fabrication of microelectromechanical systems, nanoelectromechanical systems, optical devices, and fin field-effect transistors, and for reducing process costs. Electrochemical micromachining has been introduced for highly… read more here.
Keywords: electrochemical local; silicon etchant; local etching; condensation ... See more keywords