The Application of Scallop Nanostructure in Deep Silicon Etching.
Sign Up to like & getrecommendations! Published in 2020 at "Nanotechnology"
DOI: 10.1088/1361-6528/ab88f0
Abstract: Micro/nanostructures with high aspect ratio in silicon wafer obtained by plasma etching are of great significance in device fabrication. In most cases, scallop nanostructure in deep silicon etching should be suppressed. However, scallop nanostructure could… read more here.
Keywords: silicon etching; nanostructure deep; scallop nanostructure; deep silicon ... See more keywords
Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.449870
Abstract: An all-silicon long-wavelength infrared (LWIR) achromatic metalens based on deep silicon etching is designed in this paper. With a fixed aperture size, the value range of the equivalent optical thickness of the non-dispersive meta-atoms constructing… read more here.
Keywords: silicon long; achromatic metalens; deep silicon; silicon etching ... See more keywords