Selective phosphorus doping of polycrystalline silicon on glass using self-assembled monolayer doping (MLD) and flash anneal
Sign Up to like & getrecommendations! Published in 2021 at "Materials Letters"
DOI: 10.1016/j.matlet.2021.130780
Abstract: Abstract We report doping of thin (~60 nm) amorphous silicon (a-Si) on glass substrate to form n + polycrystalline silicon on glass in selective regions using Monolayer doping (MLD) via Flash Lamp Annealing (FLA). The phosphorus monolayer was… read more here.
Keywords: phosphorus; silicon glass; monolayer; silicon ... See more keywords
Silicon and glass very large scale microfluidic droplet integration for terascale generation of polymer microparticles
Sign Up to like & getrecommendations! Published in 2018 at "Nature Communications"
DOI: 10.1038/s41467-018-03515-2
Abstract: Microfluidic chips can generate emulsions, which can be used to synthesize polymer microparticles that have superior pharmacological performance compared to particles prepared by conventional techniques. However, low production rates of microfluidics remains a challenge to… read more here.
Keywords: polymer microparticles; glass large; microfluidic droplet; silicon glass ... See more keywords
Room-Temperature Sensing of Single Electrons Using Vibrating-Reed Electrometer in Silicon-on-Glass Technology
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2018.2876506
Abstract: In the commonly used existing silicon-on-insulator microelectromechanical systems (MEMS) process, a silicon-oxide-silicon sandwich structure in the sensor device creates parasitic capacitance, which reduces the charge sensitivity. In this letter, for the first time, we demonstrate… read more here.
Keywords: glass; silicon glass; silicon; tex math ... See more keywords
Design and Comparison of Resonant and Non-Resonant Single-Layer Microwave Heaters for Continuous Flow Microfluidics in Silicon-Glass Technology
Sign Up to like & getrecommendations! Published in 2020 at "Energies"
DOI: 10.3390/en13102635
Abstract: This paper presents a novel concept for the co-design of microwave heaters and microfluidic channels for sub-microliter volumes in continuous flow microfluidics. Based on the novel co-design concept, two types of heaters are presented, co-designed… read more here.
Keywords: glass technology; resonant non; microwave heaters; silicon glass ... See more keywords