Sign Up to like & get
recommendations!
1
Published in 2019 at "Acta Materialia"
DOI: 10.1016/j.actamat.2019.07.035
Abstract: Abstract This work is dedicated to the grain structure formation in silicon ingots with a particular focus on the crystal structure strain building and its implication in new grain nucleation process. The implied mechanisms are…
read more here.
Keywords:
nucleation;
strain building;
silicon growth;
grain nucleation ... See more keywords
Sign Up to like & get
recommendations!
0
Published in 2021 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2020.3037937
Abstract: In this study, the effect of operating conditions of the chemical vapor deposition process on the silicon growth rate in a trichlorosilane-hydrogen (TCS-H2) system was evaluated. The influence of five parameters, including wafer rotation, TCS…
read more here.
Keywords:
growth;
process;
silicon growth;
rate ... See more keywords