Strain building and correlation with grain nucleation during silicon growth
Sign Up to like & getrecommendations! Published in 2019 at "Acta Materialia"
DOI: 10.1016/j.actamat.2019.07.035
Abstract: Abstract This work is dedicated to the grain structure formation in silicon ingots with a particular focus on the crystal structure strain building and its implication in new grain nucleation process. The implied mechanisms are… read more here.
Keywords: nucleation; strain building; silicon growth; grain nucleation ... See more keywords
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2020.3037937
Abstract: In this study, the effect of operating conditions of the chemical vapor deposition process on the silicon growth rate in a trichlorosilane-hydrogen (TCS-H2) system was evaluated. The influence of five parameters, including wafer rotation, TCS… read more here.
Keywords: growth; process; silicon growth; rate ... See more keywords