Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching.
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DOI: 10.1364/oe.449870
Abstract: An all-silicon long-wavelength infrared (LWIR) achromatic metalens based on deep silicon etching is designed in this paper. With a fixed aperture size, the value range of the equivalent optical thickness of the non-dispersive meta-atoms constructing… read more here.
Keywords: silicon long; achromatic metalens; deep silicon; silicon etching ... See more keywords