Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators
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DOI: 10.1109/jmems.2021.3077633
Abstract: Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity to environmental… read more here.
Keywords: silicon mems; frequency fluctuations; frequency; temperature pressure ... See more keywords