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Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.111008
Abstract: Abstract Herein we report a microfluidic device integrated with a PDMS membrane nano-filter for the size-based trapping of particles. We propose a novel cost-effective fabrication process to form submicron-sized nano-pore and slit arrays in the…
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Keywords:
pdms membrane;
membrane;
silicon mold;
size ... See more keywords