LAUSR

Silicon nanostructure-based photonic MEMS sensor for biosensing application

Sign Up to like & get
recommendations!
0 Published in 2021 at "Journal of Nanophotonics"

DOI: 10.1117/1.jnp.15.026001

Abstract: Abstract. We explored the design of an optical pressure sensor. The objective is to create a photonic microelectromechanical system-based cantilever sensor design to detect prostate-specific antigen, a protein biomarker associated with prostate cancer. Sensor’s performance… read more here.

Keywords: sensitivity mpa; shaped microcantilever; sensitivity; silicon nanostructure ... See more keywords