Silicon Near-Infrared Sensor Using Trench Photodiode Array
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DOI: 10.1109/access.2021.3065251
Abstract: In this paper, we report a method of increasing the sensitivity of a silicon near-infrared sensor. The sensor is realized by forming multiple trench-type photodiodes in a silicon chip. The trench photodiodes can be formed… read more here.
Keywords: silicon near; near infrared; infrared sensor; inline formula ... See more keywords