Evolution of chemo-mechanical effects during single grit diamond scratching of monocrystalline silicon in the presence of potassium hydroxide
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DOI: 10.1016/j.wear.2020.203292
Abstract: Abstract Efficiency and workability of silicon wafers for various applications depend on theirs surface integrity and damage free structures. Productivity of mechanical processing on silicon wafers is always limited by occurrence of cracks and brittle… read more here.
Keywords: silicon presence; chemo mechanical; single grit; silicon ... See more keywords