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Published in 2018 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2017.10.047
Abstract: Abstract A new method for SiC elimination from multicrystalline silicon with Al addition by using the chemical reaction between Al and SiC is conducted in this study. Inclusion-free region is obtained when Al addition content…
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Keywords:
silicon scraps;
multicrystalline silicon;
addition;
silicon ... See more keywords