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Published in 2025 at "IEEE Transactions on Components, Packaging and Manufacturing Technology"
DOI: 10.1109/tcpmt.2025.3613679
Abstract: In this article, an all-silicon single-layer terahertz (THz) grating combined with both static and deformable structures is proposed and experimentally demonstrated for simultaneously angular and linear displacement sensing. The experimental results illustrate an outstanding sensitivity…
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Keywords:
single layer;
silicon single;
angular linear;
linear displacement ... See more keywords
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Published in 2021 at "Materials"
DOI: 10.3390/ma14226864
Abstract: It is well-known that cracks are observed around the impression during indentation of brittle materials. The cracks inception depends on load conditions, material and indenter geometry. The paper aims to use experimental micro-indentation data, FE…
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Keywords:
mechanics;
finite element;
silicon single;
geometry ... See more keywords