Temperature Dependence of Losses in Mechanical Resonator Fabricated via the Direct Bonding of Silicon Strips
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DOI: 10.1134/s1063782620010200
Abstract: Abstract The cooling of devices fabricated from single-crystal silicon to a temperature of 123 K at which its coefficient of thermal expansion passes through zero makes it possible to improve their stability and reduce noise.… read more here.
Keywords: temperature; direct bonding; silicon strips; mechanical resonator ... See more keywords