Microstructure and resistivity of the silicon target material prepared by adding Al–B master alloy
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Materials Science: Materials in Electronics"
DOI: 10.1007/s10854-017-6493-6
Abstract: A silicon target material with the purity of 99.999 wt% (99.999%) was prepared by adding Al–B master alloy in directional solidification. The segregation behavior of the dopant and the effect on the resistivity were studied in… read more here.
Keywords: resistivity; target material; master alloy; silicon ... See more keywords
Influence of Si-addition on wear and oxidation resistance of TiWSixN thin films
Sign Up to like & getrecommendations! Published in 2019 at "Ceramics International"
DOI: 10.1016/j.ceramint.2019.05.295
Abstract: Abstract TiWSixN films were deposited using a magnetron co-sputtering system on silicon (111), 316L stainless steel, and M2 high-speed steel substrates. The silicon target current density was varied from 0 mA/cm2 to 4.32 mA/cm2 in order to… read more here.
Keywords: thin films; microscopy; oxidation; resistance ... See more keywords