Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Electron Device Letters"
DOI: 10.1109/led.2018.2816646
Abstract: In this letter, we present for the first time, a successful fabrication and characterization of silk piezoelectric thin film-based piezoelectric micromachined ultrasonic transducer (PMUT). One of the exacting problems in the PMUT research is to… read more here.
Keywords: piezoelectric micromachined; silk piezoelectric; thin film; piezoelectric thin ... See more keywords