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Published in 2021 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2021.111582
Abstract: Abstract Localized electrochemical deposition (LECD) is a promising and economical three-dimensional (3D) microstructure fabrication method. As the current research on LECD mainly focuses on the deposition of copper and nickel, this work investigated the fabrication…
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Keywords:
localized electrochemical;
electrochemical deposition;
silver microcolumns;
deposition ... See more keywords