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Published in 2018 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2018.01.011
Abstract: Abstract Sub-400-nm high-resolution and -accuracy nanopatterning of silver nanopaste containing volatile solvents was demonstrated by thermal nanoimprint lithography using a porous, cyclodextrin-based, gas-permeable mold for the application of high-surface-area heat sinks. The silver nanoparticles have…
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Keywords:
resolution;
high resolution;
silver nanopaste;
gas ... See more keywords
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Published in 2021 at "Optical Engineering"
DOI: 10.1117/1.oe.60.8.087101
Abstract: A patterned laser lift-off technique is adopted for fabricating terahertz (THz) metamaterials with micrometer precision. A shaped UV laser pulse is used to remove low-viscosity silver nanopaste from a quartz substrate. Various types of metal…
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Keywords:
silver nanopaste;
laser lift;
patterned laser;
viscosity silver ... See more keywords