A simple edge-following scanning algorithm for proton beam writing and other direct-write lithographies
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DOI: 10.1088/1361-6439/aafa03
Abstract: The quality of the structures fabricated using proton beam writing (PBW) and other direct-write microfabrication methods is strongly influenced by the path followed by the writing beam during the exposure. In particular, it is necessary… read more here.
Keywords: direct write; beam writing; simple edge; proton beam ... See more keywords