Design, Analysis, Simulation, and Fabrication of a Novel Linear MEMS Capacitive Inclinometer
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DOI: 10.1109/jsen.2018.2851660
Abstract: Design, analysis, simulation, and fabrication of a novel MEMS capacitive inclination sensor is reported. Through precise analysis, a linear relationship between output capacitance and the inclination angle of the structure is extracted which is attributed… read more here.
Keywords: analysis simulation; simulation fabrication; design analysis; structure ... See more keywords