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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3535-1
Abstract: A resonant accelerometer was designed and simulated in detail. The structure was composed of external frame and internal structure. The internal structure consists of a single proof mass, a pair of resonators and elastic beams.…
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Keywords:
simulations resonant;
design simulations;
resonant accelerometer;
structure ... See more keywords