Electrical properties of nanostructured SiN films for MEMS capacitive switches
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/0960-1317/27/1/014001
Abstract: The electrical properties of gold nanorods nanostructured silicon nitride films are comprehensively investigated with the aid of metal–insulator–metal capacitors and RF MEMS capacitive switches. Different nanorod diameters and densities were grown on the bottom electrode… read more here.
Keywords: sin films; properties nanostructured; mems capacitive; capacitive switches ... See more keywords