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Published in 2018 at "Nanotechnology"
DOI: 10.1088/1361-6528/aaabce
Abstract: We report a simple and scalable technique for the fabrication of nanopore arrays on freestanding SiN and graphene membranes based on electron-beam lithography and reactive ion etching. By controlling the dose of the single-shot electron-beam…
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Keywords:
sin graphene;
lithography;
nanopore arrays;
freestanding sin ... See more keywords