Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging.
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DOI: 10.1364/oe.446733
Abstract: Silicon based optoelectronic integrated optical phased array is attractive owing to large-dense integration, large scanning range and CMOS compatibility. In this paper, we design and fabricate a SiN-on-SOI two-dimensional optical phased array chip. We demonstrate… read more here.
Keywords: phased array; multi layered; optical phased; two dimensional ... See more keywords