Ultra-Precision Machining of a Compound Sinusoidal Grid Surface Based on Slow Tool Servo
Sign Up to like & getrecommendations! Published in 2018 at "Materials"
DOI: 10.3390/ma11061001
Abstract: Compound sinusoidal grid surface with nanometric finish plays a significant role in modern systems and precision calibrator, which can make the systems smaller, the system structure more simple, reduce the cost, and promote the performance… read more here.
Keywords: surface; grid surface; sinusoidal grid; compound ... See more keywords
Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid
Sign Up to like & getrecommendations! Published in 2019 at "Micromachines"
DOI: 10.3390/mi10120828
Abstract: Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics… read more here.
Keywords: pressure plasma; surface; sinusoidal grid; plasma processing ... See more keywords