Down-shifting Si-based layer for Si solar applications
Sign Up to like & getrecommendations! Published in 2017 at "Solar Energy Materials and Solar Cells"
DOI: 10.1016/j.solmat.2017.05.011
Abstract: SiNx and SiNx:Tb3+ thin layers were deposited by reactive magnetron co-sputtering with the objective of optimizing the light management in Si solar cells. Those Si-based layers are developed to be compatible with the Si-PV technology.… read more here.
Keywords: sinx; shifting based; layer; sinx tb3 ... See more keywords
Moisture barrier and bending properties of silicon nitride films prepared by roll-to-roll plasma enhanced chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.06.003
Abstract: Abstract In this study, we demonstrated a single-layer silicon nitride (SiNx) film deposited on polyethyleneterephthalate substrate as a moisture permeation barrier film that reduced the water vapor transmission rate (WVTR). The SiNx film was fabricated… read more here.
Keywords: sinx film; barrier; moisture; roll ... See more keywords
Characterization of SiNx:H thin film as a hydrogen passivation layer for silicon solar cells with passivated contacts
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.02.016
Abstract: Abstract Silicon nitride (SiNx:H) films are generally used as passivation and anti-reflection layers in solar cells, and they are usually made by plasma-enhanced chemical vapor deposition (PECVD). Silicon nitride could act as a hydrogen diffusion… read more here.
Keywords: passivation; film; solar cells; silicon ... See more keywords
The low-temperature remote-plasma-activated pulsed chemical vapor deposition route to SiNx from 1,3,5-tri(isopropyl)cyclotrisilazane
Sign Up to like & getrecommendations! Published in 2020 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.138299
Abstract: Abstract High-quality silicon nitride (SiNx) thin films were grown by remote-plasma-activated pulsed chemical vapor deposition (P-CVD) from the source precursor 1,3,5-tri(isopropyl)cyclotrisilazane (TICZ, C9H27N3Si3) and remote ammonia (NH3) plasma on silicon oxide (SiO2) substrates within an… read more here.
Keywords: plasma; temperature; sinx; vapor ... See more keywords
Resolving the debated atomic structure of the metastable cubic SiNx tissue phase in nanocomposites with TiN
Sign Up to like & getrecommendations! Published in 2018 at "Physical Review Materials"
DOI: 10.1103/physrevmaterials.2.093608
Abstract: The TiN/SiNx nanocomposite and nanolaminate systems are the archetype for super if not ultrahard materials. Yet, the nature of the SiNx tissue phase is debated. Here, we show by atomically resolved ... read more here.
Keywords: resolving debated; tissue phase; sinx; sinx tissue ... See more keywords
Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
Sign Up to like & getrecommendations! Published in 2019 at "Applied Sciences"
DOI: 10.3390/app9173531
Abstract: Silicon nitride (SiNx) thin films using 1,3-di-isopropylamino-2,4-dimethylcyclosilazane (CSN-2) and N2 plasma were investigated. The growth rate of SiNx thin films was saturated in the range of 200–500 °C, yielding approximately 0.38 Å/cycle, and featuring a… read more here.
Keywords: plasma; sinx; step; remote plasma ... See more keywords
Improvement of GaN crystalline quality by SiNx layer grown by MOVPE
Sign Up to like & getrecommendations! Published in 2020 at "Lithuanian Journal of Physics"
DOI: 10.3952/physics.v59i4.4134
Abstract: In this work the mechanism which helps to reduce the dislocation density by deposition of a SiNx interlayer is discussed. It is shown that the dislocation reduction by SiNx interlayer deposition is influenced by dislocation… read more here.
Keywords: sinx interlayer; dislocation; dislocation density; sinx ... See more keywords