Moisture barrier and bending properties of silicon nitride films prepared by roll-to-roll plasma enhanced chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.06.003
Abstract: Abstract In this study, we demonstrated a single-layer silicon nitride (SiNx) film deposited on polyethyleneterephthalate substrate as a moisture permeation barrier film that reduced the water vapor transmission rate (WVTR). The SiNx film was fabricated… read more here.
Keywords: sinx film; barrier; moisture; roll ... See more keywords
Effect of H 2 addition during PECVD on the moisture barrier property and environmental stability of H:SiN x film
Sign Up to like & getrecommendations! Published in 2021 at "Journal of the American Ceramic Society"
DOI: 10.1111/jace.18000
Abstract: A hydrogenated silicon nitride (H:SiNx) film with enhanced moisture barrier property and environmental stability was developed using plasma-enhanced chemical vapor deposition (PECVD) with the addition of H2 gas at 100 °C. The moisture barrier property… read more here.
Keywords: moisture barrier; sinx film; environmental stability; barrier property ... See more keywords