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Published in 2018 at "Journal of Electronic Materials"
DOI: 10.1007/s11664-018-6271-0
Abstract: Si-rich SiNx films with different stoichiometry were grown on Si substrate by plasma-enhanced chemical vapor deposition. The Si content was varied by changing the NH3/SiH4 gas flow ratio from 0.45 up to 1.0. Conventional furnace…
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Keywords:
light emission;
sinx films;
modification light;
excitation light ... See more keywords
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Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2020.146386
Abstract: Abstract From the point of view in sustainable energy, photovoltaic (PV) technology has been recognized as one of the most suitable solutions to replace fossil fuel technologies for electrical generation. However, in PV modules, 95%…
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Keywords:
passivated emitter;
hydrogenation;
sinx films;
emitter rear ... See more keywords