Effect of in-situ SiNx grown with different carrier gas on structural and electrical properties of GaN-based MISHEMTs
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DOI: 10.1063/5.0146447
Abstract: In this work, the effect of in situ SiNx grown with different carrier gas on the structural and electrical properties of the SiNx/AlGaN/GaN MIS-HEMTs is studied. It was found that the growth rate of SiNx… read more here.
Keywords: carrier gas; carrier; growth; situ sinx ... See more keywords