Modeling and analysis of SiO2 deposition during high-purity fused silica glass synthesis by SiCl4 chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2019 at "Ceramics International"
DOI: 10.1016/j.ceramint.2019.02.147
Abstract: Abstract Large-size and high-purity fused silica glass fabricated by chemical vapor deposition (CVD) has been widely applied to many advanced optical systems. The deposition process is critical during fused silica glass synthesis. In this study,… read more here.
Keywords: sio2 deposition; high purity; silica glass; deposition ... See more keywords
Mobility improvement of 4H-SiC (0001) MOSFETs by a three-step process of H2 etching, SiO2 deposition, and interface nitridation
Sign Up to like & getrecommendations! Published in 2021 at "Applied Physics Express"
DOI: 10.35848/1882-0786/abdcd9
Abstract: 4H-SiC(0001) metal-oxide-semiconductor field-effect transistors (MOSFETs) and MOS capacitors were fabricated by the following procedures: H2 etching, SiO2 deposition, and nitridation, and their electrical characteristics were evaluated. Substantially low interface state densities (4–6 × 1010 cm−2… read more here.
Keywords: sio2 deposition; sic 0001; etching sio2; nitridation ... See more keywords