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Comparison of Sb2O3 and Sb2O3/SiO2 Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure

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Published in 2022 at "Membranes"

DOI: 10.3390/membranes12080734

Abstract: In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb2O3/SiO2 double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb2O3/SiO2 double stacked membranes with appropriate annealing had better material quality and sensing… read more here.

Keywords: sb2o3; electrolyte insulator; insulator semiconductor; double stacked ... See more keywords