Super fine cerium hydroxide abrasives for SiO2 film chemical mechanical planarization performing scratch free
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DOI: 10.1038/s41598-021-97122-9
Abstract: Face-centered-cubic crystallized super-fine (~ 2 nm in size) wet-ceria-abrasives are synthesized using a novel wet precipitation process that comprises a Ce4+ precursor, C3H4N2 catalyst, and NaOH titrant for a synthesized termination process at temperature of at… read more here.
Keywords: wet ceria; sio2 film; super fine; chemical mechanical ... See more keywords