Effect of SiO2 hexagonal pattern on the crystal and optical properties of epitaxial lateral overgrown semipolar (11-22) GaN film
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DOI: 10.1016/j.mee.2016.10.017
Abstract: Abstract We studied the optical and crystal properties of semipolar (11-22) hexagonal epitaxial lateral overgrown (HELO) GaN films with different SiO2 hexagonal pattern widths (6–15 μm). With increasing SiO2 hexagonal pattern width, it was difficult to… read more here.
Keywords: gan film; pattern; pattern width; hexagonal pattern ... See more keywords