Advantage of SiO2 Intermediate Layer on the Electron Injection for Ti/n-Al0.60Ga0.40N Structure
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DOI: 10.1109/ted.2020.3007363
Abstract: In this work, and experimentally propose inserting an SiO2 intermediate layer between the Ti and n-AlGaN layer to improve the electron injection efficiency. When the SiO2 intermediate layer is adopted, the SiO2 layer can share… read more here.
Keywords: al0 60ga0; electron injection; intermediate layer; sio2 intermediate ... See more keywords