SiOx:C/SiO2-like gas barrier multilayer thin films deposited by radio frequency magnetron sputtering-based plasma polymerization system
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DOI: 10.1016/j.tsf.2018.04.018
Abstract: Abstract The radio-frequency magnetron sputtering-based plasma polymerization system has two benefits. First, it can be operated at low pressures (~10−1 Pa) to improve the quality of plasma polymer films. And second, it is a simple process… read more here.
Keywords: thin films; system; gas barrier; sio2 like ... See more keywords