Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters
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DOI: 10.3390/app7080822
Abstract: Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO2/LiNbO3 layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the… read more here.
Keywords: sio2 linbo3; layer; picosecond photoacoustic; linbo3 layer ... See more keywords