Determination of frequency and voltage dependence of electrical properties of Al/(Er2O3/SiO2/n-Si)/Al MOS capacitor
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DOI: 10.1007/s10854-020-03438-z
Abstract: In this study, we investigated the effects of applied voltage and frequencies on the electrical properties of Al/(Er2O3(150 nm)/SiO2(20 nm)/n-Si)/Al MOS capacitor. The e-beam deposited Er2O3/SiO2 films were annealed at 650 °C in N2 ambient… read more here.
Keywords: voltage; frequency; mos capacitor; sio2 mos ... See more keywords