Stress mechanisms of SiO2 and Nb2O5 thin films sputtered on flexible substrates investigated by finite element method
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DOI: 10.1016/j.surfcoat.2018.03.051
Abstract: Abstract The stress mechanisms of SiO2 and Nb2O5 thin films sputtering on BK-7 glass, PET, and PC flexible substrates were investigated by the numerical analysis of the finite element method (FEM). Residual stress is a… read more here.
Keywords: flexible substrates; thin films; nb2o5 thin; sio2 nb2o5 ... See more keywords