Surface modification of SiOx film anodes by laser annealing and improvement of cyclability for lithium-ion batteries
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DOI: 10.1016/j.mssp.2020.105300
Abstract: Abstract SiOx (x = 0.66, 0.76 and 1.04) film anodes with the different oxygen content were prepared by radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) through adjusting SiH4/N2O (R) gas flow ration. The introduction of oxygen can… read more here.
Keywords: capacity; film anodes; siox film; film ... See more keywords