Investigating the impact of SEM chamber conditions and imaging parameters on contact resistance of in situ nanoprobing.
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DOI: 10.1088/1361-6528/aa79ea
Abstract: In this paper, we investigate the impact of vacuum chamber conditions (cleanliness level and vacuum pressure) and imaging parameters (magnification and acceleration voltage) of scanning electron microscopy (SEM) on the contact resistance of two-point in… read more here.
Keywords: contact resistance; situ nanoprobing; imaging parameters; resistance ... See more keywords